JPS6069593A - 微動ステ−ジ機構 - Google Patents

微動ステ−ジ機構

Info

Publication number
JPS6069593A
JPS6069593A JP17893983A JP17893983A JPS6069593A JP S6069593 A JPS6069593 A JP S6069593A JP 17893983 A JP17893983 A JP 17893983A JP 17893983 A JP17893983 A JP 17893983A JP S6069593 A JPS6069593 A JP S6069593A
Authority
JP
Japan
Prior art keywords
stage
piezoelectric element
fine movement
mask
stage mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17893983A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449675B2 (en]
Inventor
定夫 杉山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Tateisi Electronics Co
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tateisi Electronics Co, Omron Tateisi Electronics Co filed Critical Tateisi Electronics Co
Priority to JP17893983A priority Critical patent/JPS6069593A/ja
Publication of JPS6069593A publication Critical patent/JPS6069593A/ja
Publication of JPH0449675B2 publication Critical patent/JPH0449675B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP17893983A 1983-09-26 1983-09-26 微動ステ−ジ機構 Granted JPS6069593A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17893983A JPS6069593A (ja) 1983-09-26 1983-09-26 微動ステ−ジ機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17893983A JPS6069593A (ja) 1983-09-26 1983-09-26 微動ステ−ジ機構

Publications (2)

Publication Number Publication Date
JPS6069593A true JPS6069593A (ja) 1985-04-20
JPH0449675B2 JPH0449675B2 (en]) 1992-08-12

Family

ID=16057281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17893983A Granted JPS6069593A (ja) 1983-09-26 1983-09-26 微動ステ−ジ機構

Country Status (1)

Country Link
JP (1) JPS6069593A (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62264543A (ja) * 1986-03-27 1987-11-17 フォルシュングスツエントルム・ユーリッヒ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング 対象物の微小移動のための装置
JPS6382389A (ja) * 1986-09-26 1988-04-13 新技術事業団 試料微動機構
JPS63193089A (ja) * 1987-02-06 1988-08-10 株式会社日立製作所 ６自由度微動装置
JPS6454393A (en) * 1987-08-26 1989-03-01 Nec Corp Flap stage

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817616A (ja) * 1981-07-24 1983-02-01 Nippon Telegr & Teleph Corp <Ntt> 移動ステ−ジ
JPS5831404U (ja) * 1981-08-26 1983-03-01 東芝機械株式会社 Ｎ段式空圧シリンダ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817616A (ja) * 1981-07-24 1983-02-01 Nippon Telegr & Teleph Corp <Ntt> 移動ステ−ジ
JPS5831404U (ja) * 1981-08-26 1983-03-01 東芝機械株式会社 Ｎ段式空圧シリンダ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62264543A (ja) * 1986-03-27 1987-11-17 フォルシュングスツエントルム・ユーリッヒ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング 対象物の微小移動のための装置
JPS6382389A (ja) * 1986-09-26 1988-04-13 新技術事業団 試料微動機構
JPS63193089A (ja) * 1987-02-06 1988-08-10 株式会社日立製作所 ６自由度微動装置
JPS6454393A (en) * 1987-08-26 1989-03-01 Nec Corp Flap stage

Also Published As

Publication number Publication date
JPH0449675B2 (en]) 1992-08-12

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